Alan D. Feinerman

  • Associate Professor

    Education :

    Ph.D. Physics

    Northwestern University, 1987

    M.S. Physics

    Northwestern University, 1983

    B.S. Engineering Physics

    Cornell University , 1978

    Research Interests :

    Current research is the development of ultra low thermal conductivity insulation, microfluidics for laboratory on a chip and drug delivery, distributed physical vapor deposition of alloys and compounds, and granular physics.

    Publications

    I. Books

    None

    II. Contributing Author

    A.D. Feinerman and D.A. Crewe, “3D Fabrication of Miniature Electron Optics,” invited chapter in Advances in Imaging and Electron Physics: Electron Microscopy and Holography, Editor P.W. Hawkes, vol. 121, pp.91-142, 2002.

    A.D. Feinerman and D.A. Crewe, "Miniature Electron Optics," invited chapter in Advances in Imaging and Electron Physics, Editor P.W. Hawkes, vol. 102, pp.187-234, 1998.

    III. Refereed Journals

    Z. Wan, H. Zeng, and A. Feinerman “Reversible Electrowetting of Liquid-Metal Droplet,” J. Fluids Engineering, Vol. 129, No. 4, pp. 388-394, 2007.

    H. Zeng, Z. Wan, and A.D. Feinerman, “Tilting Micromirror With a Liquid-Metal Pivot,” J. Microelectromechanical Systems, Vol. 15, No. 6, pp. 1568-1575, 2006.

    Z. Wan, H. Zeng, and A. Feinerman “An area-tunable micromirror based on electrowetting actuation of liquid-metal droplets,” Applied Physics Letters, Vol. 89, 201107, 2006. Reprinted in Virtual Journal of Nanoscale Science & Technology, November 27, 2006, Vol. 14, Issue 22, www.vjnano.org.

    H. Zeng, Z. Wan, and A.D. Feinerman, “Fabrication of Micro/Nano Fluidic Channels with Sacrificial Galvanic Coupled Metals,” Nanotechnology, Vol. 17 pp. 3183-3188, 2006.

    H. Zeng, A.D. Feinerman, Z. Wan, and P. Patel, “ Piston motion micromirror based on electrowetting of liquid metals,” J. Microelectromechanical Systems, Vol. 14, No. 2, pp. 285-294, 2005.

    H. Busta, S. Lesiak, B. Zwicker, A.D. Feinerman, J. Montgomery, and Z. Wan, “X-Ray Generation From Large Area Carbon-Based Field Emitters," JVST B, Vol. 23, No. 2, pp. 814-818, 2005.

    H. Busta, Z. Tolt, J. Montgomery, and A.D. Feinerman, “Field Emission from Teepee-shaped Carbon Nanotube Bundles," JVST B, Vol. 23, No. 2, pp. 676-679, 2005.

    Z. Wan, A.D. Feinerman, H. Zeng, and G. Friedman “Electrocapillary Piston Motion and a Prototype of Phase Manipulating Micromirror,” J. Microelectromechanical Systems, Vol. 13, No. 4, pp. 620-627, 2004.

    H. Busta, D. Boldridge, R. Myers, G. Snider, E. Edwards, and A.D. Feinerman, “Electron emission from carbon black-based field emitters including diesel exhaust," JVST B, Vol. 22, No. 3, pp.1261-1265, 2004.

    H. Busta, D. Boldridge, R. Myers, E. Edwards, and A.D. Feinerman, "Field emission from carbon black and carbon black and silica nanoparticles dispersed in photoresist," Applied Physics Letters, Vol. 83, No. 9, pp. 1779-1781, 2003.

    B. Yellen, G. Friedman, A.D. Feinerman, "Patterning of Super-Paramagentic Colloidal Particles", J. Appl. Phys. Vol. 93, No. 10, pp.7331-7333, 2003.

    B. Yellen, G. Friedman, A.D. Feinerman, "Analysis of interactions for magnetic particles assembling on magnetic templates", J. Appl. Phys., Vol. 91, No. 10, pp. 8552-8554, 2002.

    J.J. Song, S. Baikar, F. Decarlo, Y.W. Kang, R.L. Kustom, D.C. Mancini, B. Lai, A.D. Feinerman, and V. White, "LIGA fabricated compact mm-wave linear accelerator cavities," Microsystem Technologies, Vol. 4, No. 4, pp. 193-196, 1998.

    D.A. Crewe, M.M. Ruffin, and A.D. Feinerman, "Initial Tests of a Micromachined SEM," J. Vac. Sci. & Technol. B, Vol 14, No. 6, pp. 3808-3812, 1996.

    J.J. Song, H. Henke, A.D. Feinerman, G.M. Wells, V. White, Y.W. Kang, R.L. Kustom, B. Lai, F.E. Mills, and A. Nassiri, “Fabrication of mm-wave undulator cavities,” Rev. Sci. Instrum., Vol. 67, No. 9, p. 3348, 1996.

    A.D. Feinerman, R. Lajos, V. White, and D. Denton, “X-ray Lathe: an x-ray lithographic exposure tool for non-planar objects,” J. Microelectromechanical Systems, Vol. 5, No. 4, pp. 250-255, 1996.

    T.L. Willke, and A.D. Feinerman, "Deep-Etch Silicon MM-Waveguide Structure for the Relativistic Acceleration of Electrons," J. Vac. Sci. Technol. B Vol. 14, No. 4, pp. 2524-2530, 1996.

    P.J. Matthews, T. Berenc, F. Schoenfeld, R.L. Kustom, and A.D. Feinerman, "Electromagnetic Field Measurements on a mm-wave Linear Accelerator," IEEE Trans. Microwave Theory Tech. Vol. 44, No. 8, pp. 1401-1409, 1996.

    L.R. Turner, A. Nassiri, F.E. Mills, S. Kim, and A.D. Feinerman, "A Micro-Undulator Fabricated by LIGA Processes," IEEE Trans. Magn., Vol. 32, No. 4, pp. 2602-2604, 1996.

    A.D. Feinerman, and S.R. Thodati, "Millimeter-scale Actuator with Fiberoptic Roller Bearings," J. Microelectromechanical Systems, Vol. 4, No. 1, pp. 28-33, 1995.

    A.D. Feinerman, D.A. Crewe, and A.V. Crewe, "Microfabrication of Arrays of Scanning Electron Microscopes," J. Vac. Sci. Technol. B, Vol. 12, No. 6, pp. 3182-3186, 1994.

    S.E. Shoaf, and A.D. Feinerman, "Aligned Au-Si Eutectic Bonding of Silicon Structures," J. Vac. Sci. Technol. A, Vol. 12, No. 1, pp. 19-22, 1994.

    D.A. Crewe, D.C. Perng, S.E. Shoaf, and A.D. Feinerman, "A Micromachined Electrostatic Electron Source," J. Vac. Sci. Technol. B, Vol. 10, No. 6, pp. 2754-2758, 1992.

    A.D. Feinerman, D.A. Crewe, D.C. Perng, S.E. Shoaf, and A.V. Crewe, "Sub-cm Electron Microscope," J. Vac. Sci. Technol. A, Vol. 10, No. 4, pp. 611-616, 1992.

    D.C. Perng, D.A. Crewe, and A.D. Feinerman, "Micromachined Thermionic Emitters," J. Micromechanics and Microengineering, Vol. 2, No. 1 pp. 25-30, 1992.

    A.D. Feinerman, "Factors Affecting the Encroachment of Tungsten into the Si/SiO 2 Interface During the Reduction of Tungsten Hexafluoride by Silicon," J. Electrochem. Soc., Vol. 137, pp. 3683-3687, 1990.

    J.G. Black, D.J. Ehrlich, J.H.C. Sedlacek, A.D. Feinerman and H.H. Busta, "Rapid Low­Resistance Interconnects by Selective Tungsten Deposition on Laser-Direct-Written Polysilicon," IEEE Electron Device Lett. 7, Vol. EDL-7, No. 7, pp. 422-424, 1986.

    H.H. Busta, J.B. Ketterson, A.D. Feinerman and G.K. Wong, "Formation of Ultrathin Tungsten Filaments via Selective Low-Pressure Chemical Vapor Deposition," J. Appl. Phys. Vol. 58, No. 2, pp. 987-989, 1985.

     

    III. Conference Papers

    A.D. Feinerman, R. Lajos, V. Sood, and R.J. Carlton, “Vacuum Insulation Panels with Supporting Elements in Tension,” Proceedings of the 29 th International Thermal Conductivity Conference and the 17 th International Thermal Expansion Symposium, Birmingham, Alabama, June 24-27, 2007 (under review).

    H.H. Busta, J. Montgomery, B. Schwandt, and A. Feinerman, "X-ray generation from miniaturized vacuum tubes with diameters ranging from 1 to 5mm," Technical Digest of the 18th International Vacuum Nanoelectronics Conference, St. Catherine's College, Oxford, UK, 78, 2005.

    Z. Wan, H. Zeng, and A. Feinerman, “Reversible Electrowetting of Liquid-Metal Droplet,” Proceedings of 2005 ASME International Mechanical Engineering Congress, Nov 5-11, 2005, Orlando, FL, No. IMECE2005-81007

    H. Zeng, A. Feinerman, and Z. Wan, “A Sacrificial Method for Fabricating Micro/Nano channel using galvanic corrosion,” Proceedings of 2005 ASME International Mechanical Engineering Congress, Nov 5-11, 2005, Orlando, FL, No. IMECE2005-81124

    H. Busta, S. Lesiak, J. Montgomery, and A. Feinerman “Carbon-based nanoemitters for large scale x-ray sterilization applications,” 2005 Sensors Expo and Conference, Chicago, IL, 2005.

    H. Busta, Z. Tolt, J. Montgomery, and A. Feinerman, “Field Emission from Teepee-shaped Carbon Nanotube Bundles,” Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IVNC), pp. 30 – 31, 11-16 July 2004.

    H. Zeng, A.D. Feinerman, and Z. Wan, "A Compact, Easily Assembled Micromirror with Liquid Metal Pivot", Proceedings of 2003 ASME International Mechanical Engineering Congress, Nov 15-21, 2003, Washington, D.C., No ASME2003-41528

    Z. Wan, A.D. Feinerman, G. Friedman, and H. Zeng, "Electrocapillary piston motion and a prototype of phase-manipulating micromirror," Proceedings of IMECE'03: 2003 ASME International Mechanical Engineering Congress, Washington, D.C., No: IMECE2003-41288, 2003.

    X. Chen, R. Ruoff, H. Busta, E. Edwards, and A. Feinerman, “Field emission from graphite platelet nanofibers (GPNs),” Technical Digest of the 16th International Vacuum Microelectronics Conference (IVMC), pp. 215 - 216 , 7-11 July 2003.

    E. Edwards, H. Busta, and A. Feinerman, “Visualization of the temperature distribution of carbon nanotube field emitters using thermochromic liquid crystal sheets,” Technical Digest of the 16th International Vacuum Microelectronics Conference (IVMC), pp. 211 - 212, 7-11 July 2003.

    H. Busta, C. Partee, S. Joray, T. Lang, E. Edwards, and A. Feinerman, ” Field emission from a polymeric precursor to diamond-like carbon (DLC), Technical Digest of the 16th International Vacuum Microelectronics Conference (IVMC), pp. 175 - 176 , 7-11 July 2003.

    B.B. Yellen, G. Friedman, and A.D. Feinerman, “Magnetically driven assembly of superparamagnetic colloidal particles,” Proceedings of SPIE, Vol. 4982, p. 302, 2003.

    A.D. Feinerman, G. Friedman, E. Kasman, J. Montgomery, P. Patel, C.M. Megaridis, E. Howell, "Agile Micro-Mirrors with Three Degrees of Freedom Manufactured with Liquid MEMS Technology," in Free-Space Laser Communication and Laser Imaging, David G. Voelz, Jennifer C. Ricklin, Editors, Proceedings of SPIE, Vol. 4489, 166-176, 2002.

    B. Gimi, S.C. Grant, R.L. Magin, A.D. Feinerman, E. Frolova, G. Friedman, "SNR Improvements for RF Microcoils", 41 st Experimental NMR Conference, April 9, 2000

    D.A. Crewe, M.M. Ruffin, and A.D. Feinerman, "Focusing Properties of a Micromachined Electron Lens,” Proceeding of SPIE, Vol 3009, p. 102, 1997.

    Y.W. Kang, A.D. Feinerman, R.L. Kustom, A. Nassiri, and J.J. Song, "Design and Construction of Planar mm-Wave Accelerating Cavity Structures,” Synchrotron Radiation Instrumentation '95; Argonne National Laboratory; Argonne, IL October 17-18, 1995, in CD in Rev. Sci. Instrum., Vol. 67, No. 9, 1996.

    A.D. Feinerman, "Precision Fabrication of Analytical Instruments," ASPE Conference, Tucson, Arizona, April, 1995.

    R.L. Kustom, A.D. Feinerman, D. Grudzien, H. Henke, D. Horan, Y.W. Kang, A.M. Khounsary, P.J. Matthews, F.E. Mills, A. Nassiri, J. Song, and T.L. Willke, "Microcavity Structures," Proc. of Linac 94 Conference, KEK, Tsukuba, Japan, August 1994.

    P. Matthews, Y. Kang, T. Berenc, T. Willke, A.D. Feinerman, and R. Kustom, "Electromagnetic Field Measurements on a mm-wave Linear Accelerator," Proceedings of the Fourth European Particle Accelerator Conference, pp. 1303-1305, London, England, June 27 to July 1, 1994.

    A.D. Feinerman, D.A. Crewe, D.C. Perng, C.A. Spindt, P.R. Schwoebel, and A.V. Crewe, "Miniature electron microscopes for lithography," Proc. of SPIE - Microlithography '94, Vol. 2194, pp. 262-273, 1994.

    A. Nassiri, R.L. Kustom, F.E. Mills, Y.W. Kang, A.D, Feinerman, H. Henke, P. Matthews, J. Song, D. Grudzien, D. Horan, and T. Willke, "A 50 MeV mm-Wave Electron Linear Accelerator System for Production of Tunable Short Wavelength Synchrotron Radiation", IEEE, International Electron Device Meeting Digest, pp. 169-172, December 6, 1993.

    D.C. Perng, D.A. Crewe, S.B. Lee, and A.D. Feinerman, "Micromachined Thermionic Emitter," Proc. of SPIE - Imaging Technologies and Applications, Vol. 1778, pp. 90-98, 1992.

    A.D. Feinerman, D.A. Crewe, D.C. Perng, and S.E. Shoaf, and A.V. Crewe, "High Throughput Electron Beam Lithography," Proc. of SPIE - Imaging Technologies and Applications, Vol. 1778, pp. 78-89, 1992.

    D.A. Crewe, D.C. Perng, S.E. Shoaf, and A.D. Feinerman, "A Micromachined Electron Source," SPIE - Imaging Technologies and Applications, Vol. 1778, pp. 66-77, March 1992.

    A.D. Feinerman, S.E. Shoaf, and D.A. Crewe, "Precision Aligning and Bonding of Silicon Die," Patterning Science and Technology II/Interconnection and Contact Metallization for ULSI, PV92-6 pp. 115-125, edited by W. Greene, G.J. Hefferon, L.K. White, T.L. Herndon, and A.L. Wu, Electrochemical Society Proceedings.

    H.H. Busta, A.D. Feinerman, J.B. Ketterson, and R.D. Cuellar, "Strings, Loops and Pyramids - Building Blocks for Microstructures," Proceedings of the IEEE Micro Robots and Teleoperators Workshop, Hyannis, MA, November 1987. Reprinted in, Micromechanics and MEMS, Classic and Seminal Papers to 1990, by William Trimmer, page 565.

    H.H. Busta, J.F. Detry, A.D. Feinerman and J.G. Black, "Novel Device Applications Employing LPCVD Tungsten," Tungsten and Other Refractory Metals for VLSI Applications, ed. by R.S. Blewer, Materials Research Society, Pittsburgh, pp. 283­295, 1986.