Heinz H. Busta

Adjunct Professor, ECE Department

Founder, Prairie Prototypes, LLC

 

Dr. Busta has over 25 years experience in the development of new products in microelectromechanical systems (MEMS),

displays, sensors and actuators, vacuum microelectronics, light emitting diodes and nanotechnology. He is a strong

teambuilder, works well with industrial and academic partners, and has a proven track record in technology transfer from

R&D to manufacturing. Teaching experience includes teaching ECE 449 at UIC in 2004 and 2005 as well as mentoring two

IMSA students and two Ph.D. students.

 

Employment History

Prairie Prototypes, LLC, Park Ridge, IL

Founder, Nov. 2006.

A start-up company involved in the commercialization of MEMS/Nano products for medical and industrial applications. First

product under development is an X-ray catheter.

 

Cabot Microelectronics Corporation, Aurora, IL

July, 2001 until Nov. 2006

Senior Scientist, New Business Group

Worked on increasing the brightness of LEDs with improved surface quality of c-cut sapphire. Benchmarked different

sapphire suppliers and fabricated LEDs with different off-cut angles and surface roughness. Established that the brightness

correlates very strongly with the tolerance of the off-cut angle down to ±0.02 degrees. Fabricated LEDs using epitaxial lateral

overgrowth techniques and a tungsten damascene process.

Designed, performed process development, processed and tested a prototype, triple damascene RF MEMS switch.

Investigated the use of CMP for MEMS and nanotechnology applications. Developed and tested several x-ray devices based

on field emitter electron sources. Applications included catheters for therapeutic treatment and a large area X-ray source for

sterilization purposes.

 

Sarnoff Corporation, Princeton, NJ

1996 until June, 2001

Program Manager, MEMS and vacuum microelectronics.

Projects included a MEMS infrared vision system based on bimorph cantilever arrays (DARPA, 2years), micromachined

resonant tunneling field emitter devices for electronic cooling (DARPA, HERETIC Program, 3 years), SBIR with CFD

Research Corporation for a MEMS high speed gyroscope, and a MEMS-based miniaturized X-ray catheter for medical

applications.

Member of the Sarnoff MEMS task force, member of the Sarnoff MEMS optical switch program.

 

Coloray Display Corporation, Fremont, CA

1994 to 1996

Senior Principal Scientist/Director of Research

In charge of a group of seven scientists and engineers developing field emitter arrays for display applications. Fabricated

arrays of Spindt-type and vertical edge emitters and designed a full color prototype display.

 

Amoco Research Center, Naperville, IL

1986 to 1994

Senior Research Scientist/Research Associate

Worked on hydrogenated amorphous silicon for liquid crystal display applications. Developed vertical and lateral thin film

transistors with record-breaking on/off ratios.

Worked on surface micromachining techniques to develop cold electron emitter sources.

Investigated the use of emitter arrays for displays, electron beam pumped solid state lasers, and high temperature pressure

sensors.

Acted as internal consultant to Amoco Chemical Company on issues of multi chip modules using specially formulated

polyimides, on a laser planarization task force for aluminum interconnects, and headed up a task force for improving

processing yields for the manufacturing of GaAs/AlGaAs laser diodes and a high rate optoelectronic data link.

Received two Amoco Technology Company Outstanding Achievement Awards for a DNA electroporator and for a neural

network fabricated in amorphous silicon.

 

Gould Research Center, Rolling Meadows, IL

1976 to 1986

Project Manager/Program Manager/ Gould Solid State Fellow/Director of Research (Gould Medical Products Divison, Oxnard, CA)

Managed the advanced silicon materials and devices program. Developed a disposable blood pressure system, an industrial pressure gauge, a thermal print head, chemical sensors, and worked on the next generation IC processes such as 3-D CMOS and high speed interconnects in support of the AMI IC subsidiary.

Served on the Gould Scientific Board and on the AMI acquisition committee. Started and managed the corporate IC design center.

Received two Gould Scientific Achievement Awards and the Gould Fellow Award for outstanding technological contributions.

 

Teletype Corporation, Skokie, IL

1973 to 1976

R&D Engineer

Worked on materials and process development issues of custom integrated circuits. Became familiar with all aspects of IC

manufacturing such as photolithography, wet chemical and plasma etching, thin film deposition, oxidation, diffusion, ion

implantation, testing, and yield issues.

 

Publications

Book chapter:

H. H. Busta, "Field Emission Flat Panel Displays,"Chapter 7 in Vacuum Microelectronics, edited by Wei Zhu, John Wiley

& Sons, Inc., 289-347 (2001).

Invited review article:

H.H. Busta, “Vacuum Microelectronics-1992,” J. Micromechanics & Microengineering, vol. 2, 43 (1992).

 

Refereed journals:

H. Busta, K. Tao, A. Feinerman, “Evidence of electronic cooling from resonance states of nanocrystalline graphite field emitters,” J. Vac. Sci. Technol. B 26, 720 (2008). .

H. Busta, Z. Tolt, J. Montgomery, and A.D. Feinerman, “Field Emission from Teepee-shaped Carbon Nanotube Bundles,"

JVST B, Vol. 23, No. 2, pp. 676-679, 2005.

H. Busta, S. Lesiak, B. Zwicker, A.D. Feinerman, J. Montgomery, and Z. Wan, “X-Ray Generation From Large Area

Carbon-Based Field Emitters," JVST B, Vol. 23, No. 2, pp. 814-818, 2005.

H. Busta, D. Boldridge, R. Myers, G. Snider, A. Korotkov, E. Edwards and A. Feinerman, “Electron emission from carbon

black-based field emitters including diesel engine exhaust,” JVST B 22(3), 1261, 2004.

H. Busta, D. Boldridge, R. Myers, E. Edwards, and A.D. Feinerman, "Field emission from carbon black and carbon black

and silica nanoparticles dispersed in photoresist," Applied Physics Letters, Vol. 83, No. 9, pp. 1779-1781, 2003.

H. H. Busta, J. M. Chen, Z. Shen, K. Janson, S. Rizkowski, J. Matey, and A. Lanzillotto, “Characterization of Electron

Emitters for Miniature X-ray Sources,” JVST B 21 (1), 344, 2003.

H. Busta, R. Amantea, D. Furst, J. M. Chen, M. Turowski and C. Mueller, “ A MEMS shield structure for controlling pull-in

forces and obtaining increased pull-in voltages,” J. Micromech. Microeng. 11,720-725, 2001

H. Busta, D. Furst, A. T. Rakhimov, V. A. Samorodov, B. V. Seleznev, N. V. Suetin, A. Silzars, “Low Voltage Electron Emission from 'Tipless' Field Emitter Arrays,” Appl. Phys. Letters, 78, 3418, 2001.

H. Busta, D. Furst, R. Pryor, Lihua Li, “Performance Improvement of Gated Silicon Field Emitters with a Thin Layer of Boron Nitride,” JVST B, 19, 907, 2001.

H. H. Busta, R. J. Espinosa, A. T. Rakhimov, N. V. Suetin, M. A. Timofeyev, M. E. Kordesch, P. Bressler, M. Schramme,

J. R. Fields, and A. Silzars, “Performance of Nanocrystalline Graphite Field Emitters,” Solid-State Electronics 45, 1039 1047, 2001.

Heinz H. Busta and Roger W. Pryor, “Performance of Laser Ablated, Laser Annealed BN Emitters Deposited on Polycrystalline Diamond,” JVST B16, 1207, 1998.

H. H. Busta and R. W. Pryor, “Electron emission from laser ablated and laser annealed BN thin film emitter,” J. Appl. Phys. 82, 5148, 1997.

H. H. Busta, “Fabrication of gated SiC vertical edge emitters by chemical mechanical polishing,” J. Micromech. Microeng. 7, 37, 1997.

H.H. Busta, L.J. Mika, K.E. Medema, and M.A. Mitchell, “Attachment of Optoelectronic

Components to Silicon Submounts by Nd: YAG Laser Soldering of Indium,” J. Micromech. Microeng. 4, 110, 1994.

H. Busta, J. Dallesasse, S. Smith, J. Pogemiller, B. Zimmerman and R. Mathius, “Light Emission from an AlGaAs Single Quantum Well Heterostructure by Electron Excitation from a Micromachined Field Emitter Source,” J. Micromechanics & Microengineering, vol. 4, 55, 1994.

H.H. Busta, B.J. Zimmerman and J.E. Pogemiller, “Current Fluctuations of a Monocrystalline (100) Silicon Field Emitter,” J. Micromechanics & Microengineering, vol. 4, 60, 1994.

H.H. Busta, J.E. Pogemiller and B.J. Zimmerman, “A Dual-Gate Field Emitter and its Integration into a Flat Panel Display,” J. Micromechanics & Microengineering, vol. 4, 106, 1994.

J.E. Pogemiller, H.H. Busta, and B.J. Zimmerman, “Gated Chromium Volcano Emitters,” JVST B Vol. 12, no. 2, 680, 1994.

B.J. Zimmerman, H.H. Busta, and J.E. Pogemiller, “Scaling of emission currents and current fluctuations of emitter ensembles,” JVST vol. B12, no. 2, 689, 1994.

H. Busta, J. Dallesasse, S. Smith, J. Pogemiller, B. Zimmerman and R. Mathius, “Light Emission from an AlGaAs Single Quantum Well Heterostructure by Electron Excitation from a Micromachined Field Emitter Source,” J. Micromechanics & Microengineering, vol. 4, 55, 1994.

H.H. Busta, B.J. Zimmerman and J.E. Pogemiller, “Current Fluctuations of a Monocrystalline (100) Silicon Field Emitter,” J. Micromechanics & Microengineering, vol. 4, 60, 1994.

H.H. Busta, J.E. Pogemiller, and B.J. Zimmerman, “Emission Characteristics of Silicon Vacuum Triodes with Four Different Gate Geometries,” IEEE Trans. Electron Devices, vol. 40, 1530, 1993.

H.H. Busta, J.E. Pogemiller, and B.J. Zimmerman, “Collector-Assisted Operation of Micromachined Field-Emitter Triodes,” IEEE Trans. Electron Devices, vol. 40, 1537,1993.

H.H. Busta, J.E. Pogemiller, and B.J. Zimmerman, “The Field Emitter Triode as a Displacement/Pressure Sensor,” J. Micromechanics & Microengineering, vol. 3, 1, 1993.

M.C. Tringides, P. Seymour, K. Jacobs, H.H. Busta, and J.E. Pogemiller, “Single Micromachined Emitter Characteristics,” JVST, vol. B11, no. 2, 396, 1993.

H.H. Busta, B.J. Zimmerman, J.E. Pogemiller, M.C. Tringides, and C.A. Spindt, “Temperature Dependence of I-V Characteristics of Vacuum Triodes from 24 - 300 K,” JVST, vol. B11 no. 2, 100, 1993.

M. Aslam, P. Klimecky, G.P. Myers, H.H. Busta, B.J. Zimmerman, B.E. Artz, L.W. Cathey, and R.E. Elder, “Triode Characteristics and Vacuum Considerations of Evaporated Silicon Microdevices,” JVST, vol. B11, no. 2, 422, 1993.

H.H. Busta, J.E. Pogemiller, W. Chan, and G. Warren, “Experimental and Theoretical Determinations of Gate-to-Emitter Stray Capacitances of Field Emitters,” JVST, vol. B11, no. 2, 445, 1993.

H.H. Busta, D.W. Jenkins, B.J. Zimmerman, and J.E. Pogemiller, “Collector-Induced Field Emission Triode,” IEEE Trans. Electron Devices, vol. 39, 2616, 1992.

H.H. Busta, B.J. Zimmerman, M.C. Tringides, and C.A. Spindt, “DC I-V Characteristics of Field Emitter Triodes,” IEEE Trans. on Electron Devices, 38, 2558, 1991.

R.B. Marcus, T.S. Ravi, T. Gmitter, H.H. Busta, J.T. Niccum, K.K. Chin, and D. Liu, “Atomically Sharp Silicon and Metal Field Emitters,” IEEE Trans. on Electron Devices, 38, 2289, 1991.

H.H. Busta, J.E. Pogemiller, and B.J. Zimmerman, “Design of High-Vacuum Test Station for Rapid Evaluation of Vacuum Microelectronic Devices,” IEEE Trans. of Electron Devices, 38, 2350, 1991.

T.S. Ravi, R.B. Marcus, T. Gmitter, H.H. Busta, and J.T. Niccum, “Fabrication of Atomically Sharp Tungsten Tips,” Applied Physics Letters, 57, 1413, 1990.

H.H. Busta, O.K. Ersoy, J.E. Pogemiller, K.D. Mackenzie, and R.W. Standley, “Hardware Implementation of a “Wired Once” Neural Net in Thin Film Technology on a Glass Substrate,” IEEE Trans. on Electron Devices, 37, 1039, 1990.

H.H. Busta, R.R. Shadduck, and W.J. Orvis, “Field Emission from Tungsten-Clad Silicon Pyramids,” IEEE Trans. on Electron Devices, 36, 2679, 1989.

H.H. Busta, J.E. Pogemiller, R.W. Standley, and K.D. Mackenzie, “Self-Aligned Bottom Gate Submicrometer-Channel Length a-Si:H Thin Film Transistors,” IEEE Trans. on Electron Devices, 36, 2883, 1989.

H.H. Busta, “Lateral Cold Cathode Triode Structures Fabricated on Insulating Substrates,” Vacuum Microelectronics 1989, p. 26, Institute of Physics Conference Series #99, Institute of Physics, Bristol & New York.

H.H.. Busta, A.D. Feinerman, J.B. Ketterson, and R.D. Cuellar, “Strings, Loops and Pyramids - Building Blocks for Microstructures,” Proceedings IEEE Micro Robots and Teleoperator Workshop, IEEE Catalog No. 87THO204-8 (1987), p. 45. Paper chosen as one of the seminal papers in Micromechanics and MEMS, Classic and Seminal Papers to 1990, edited by William S. Trimmer, pp. 565-569, IEEE Press.

J.G. Black, D.J. Ehrlich, J.H.C. Sedlacek, A.D. Feinerman and H.H. Busta, “Rapid Low­Resistance Interconnects by Selective Tungsten Deposition on Laser-Direct-Written Polysilicon,” IEEE Electron Device Lett. 7, Vol. EDL-7, No. 7, pp. 422-424, 1986.

H.H. Busta and C.H. Tang, “Film Thickness Dependence of Silicon Reduced LPCVD Tungsten on Native Oxide Thickness,” J. Electrochem. Society, 133, 1195, 1986. Paper also presented at the 1984 Workshop on Tungsten, Albuquerque, NM, Nov., 1984, Proceedings of the 1984/1985 Workshops on Tungsten and other Refractory Metals for VLSI Applications, MRS, p. 509, 1986.

H.H. Busta, J.B. Ketterson, A.D. Feinerman and G.K. Wong, “Formation of Ultrathin Tungsten Filaments via Selective Low-Pressure Chemical Vapor Deposition,” J. Appl. Phys. Vol. 58, No. 2, pp. 987-989, 1985. ). Paper also presented at the 1984 Workshop on Tungsten, Albuquerque, NM, Nov., 1984, Proceedings of the 1984/1985 Workshops on Tungsten and other Refractory Metals for VLSI Applications, MRS, p. 533, 1986.

K.Y. Tsao and H.H. Busta, “LPCVD of Tungsten on Polycrystalline and Single Crystal Silicon via the Silicon Reduction,” J. The Electrochem. Society, 131, 2702, 1984. Paper also presented at the 1984 Workshop on Tungsten, Albuquerque, NM, Nov., 1984, Proceedings of the 1984/1985 Workshops on Tungsten and Other Refractory Metals for VLSI Applications, MRS, p. 443, 1986.

H.H. Busta and H.A. Waggener, “Precipitation-Induced Currents and Generation-Recombination Currents in Intentionally Contaminated Silicon p +n Junctions,” J.Electrochemical Society, 124, 1424, 1977.

H.H. Busta and H.A. Waggener, “Thermally Assisted Field Emission Near Precipitates in p-n Junctions,” J. Applied Physics, 48, 4385, 1977.

 

Presentations

Dr. Busta presented over 50 papers at international conferences and at Universities throughout the United States. Some of the invited papers/talks include:

H. H. Busta, J. Montgomery, B. Schwandt and A. Feinerman, “X-ray generation from miniaturized vacuum tubes with diameters ranging from 1 to 5 mm,” IVNC 2005, Oxford, England.

H. Busta, S. Lesiak, B. Zwicker, J. Montgomery, Z. Wan, and A. Feinerman, “X-ray generation from large area carbon-based field emitters,” IVNC 2004, Boston, MA.

H. H. Busta and R. J. Espinosa, “The Need for Standardization of Field Emitter Testing,” Workshop Digest, Asia Display '98, 113, 1998.

H. Busta, “Field Emitter Displays,” Invited talk, Northern California Chapter of the American Vacuum Society, San Jose, CA 6/22/1995.

H.H. Busta and R.D. Cuellar, “A Miniaturized Solid-State Flow Sensor on Insulator,” The Electrochem. Society Meeting, San Diego, CA, October, 1986, p. 882.

H.H. Busta, J.F. Detry, A.D. Feinerman, J.G. Black, D.J. Ehrlich, and J.H.C. Sedlacek, “Novel Device Applications Employing LPCVD Tungsten,” Proceedings of the 1984/1985 Workshops on Tungsten and Other Refractory Metals for VLSI Applications, Materials Research Society, p. 283, 1986.

 

Patents Issued

  1. H. H. Busta, “MEM switching device,” U.S. 7,317,232, January 8, 2008.
  2. H. H. Busta, “Method of operating and process for fabricating an electron source,” U.S. 7,317,278, January 8, 2008.
  3. H. H. Busta, “ Mobile ion memory,” U.S. 7,277,314, October 2, 2007.
  4. S. Lesiak, H. Busta, B. Zwicker, “X-ray source with nonparallel geometry,” U.S. 7,274,772, September 25, 2007.
  5. I. W. Wylie, H. H. Busta, D. J. Schroeder, J. S. Steckenrider, and Y. Wang, “Three dimensional integrated circuits,” U.S. 7,091,604, August 15, 2006.
  6. H. H. Busta, J. S. Steckenrider, “Method of Forming a Current Controlling Device,” U.S. 6,929,983 B2,August 16, 2005.
  7. H. H. Busta, “Method and Apparatus for Providing a Miniature, Flexible Voltage Upconverter,” U. S. 6,925,150 B2, August 2, 2005.
  8. D. L. Matthies, R. G. Stewart, J. H. Atherton, D. J. Bechis, H. H. Busta, Z. Shen,“Tiled Electronic Display Structure,” U. S. 6,897,855 B1, May 24, 2005.
  9. H. H. Busta, R. Amantea, “Direct View Infrared MEMS Structure,” U.S. 6,140,646, October 31, 2000.
  10. H. H. Busta, “Fabrication of Volcano-Shaped Field Emitters by Chemical-Mechanical Polishing (CMP),” U.S. 6,008,064, December 28, 1999.
  11. H. H. Busta, “Fabrication of Volcano-Shaped Field Emitters by Chemical-Mechanical Polishing (CMP),” U.S. 5,930,590, July 27, 1999.
  12. H. H. Busta, A. D. Johnson, R. S. Nowicki, “Fabrication System, Method and Apparatus for Microelectromechanical Devices,” U.S. 5,903,099, May 11, 1999.
  13. H. H. Busta, J. E. Pogemiller, “Low Turn-On Voltage Volcano-Shaped Field Emitter and Integration into an Addressable Array,” U.S. 5,874,808, February 23, 1999.
  14. H. H. Busta, “Recessed Gate Field Emission,” U.S. 5,227,699, July 13, 1993.
  15. H. H. Busta, M. L. Bittner, R. E. Cuellar, “Apparatus and Method for Electroporation,” U.S. 5,137,817, August 11, 1992.
  16. H. H. Busta, “Vertical Gate Thin Film Transistors in Liquid Crystal Array,”U.S. 4,949,141, August 14, 1990.
  17. H. H. Busta, “Method of Forming Vertical Gate Thin Film Transistors in Liquid Crystal Array,”U.S. 4,859,623, August 22, 1989.
  18. H. H. Busta, R. D. Cuellar, “Micromachined Cold Cathode Vacuum Tube Device and Method of Making,” U.S. 4,855,635, August 8, 1989.
  19. H. H. Busta, “Flow Sensor on Insulator,” U.S. 4,744,246, May 17, 1988.
  20. H. H. Busta, R. D. Cuellar, “Method of Making Micromachined Refractory Metal Field Emitters,” U.S. 4,685,996, August 11, 1987.
  21. H. H. Busta, “Laser-Recrystallized Diaphragm Pressure Sensor,” U.S. 4,592,238, June 3, 1986.
  22. H. H. Busta, K. Y. Tsao, W. D. White, P. V. Loeppert, “Miniaturized Potassium Ion Sensor,” U.S. 4,508,613, April 2, 1985.
  23. H. H. Busta, R. E. Lajos, K. B. Bhasin, “Method for End Point Detection During Plasma Etching,” U.S. 4,198,261, April 15, 1980.
  24. H. H. Busta, “Inversion Layer Strain Gauge,” U.S. 4,191,057, March 4, 1980.