The Microdevices and Micromachining Technology Lab is located in 3249A SEL, and includes the clean room facilities in 3257 SEL. This lab is equipped with a mask aligner, wet station/fume hood, class 10,000 soft wall clean room, evaporator, spinner, diffusion furnace, and soft and hard bake ovens. There are also four lab stations. Each station is equipped with a high voltage power supply, oscilloscope, digital multimeter, micropositioner probes, and a hot plate. Three PC's with AutoCAD, microscopes, and an LCZ meter are available as well.
Experiments focus on safety procedures for handling chemicals, wafer cleaning and oxidation, mask design with AutoCAD, photolithography, etching silicon dioxide, silicon anisotropic etching, metalization and lift-off process, and bonding. Students are required to fabricate a sensor project, utilizing the skills developed throughout the course.
This course requires coordination with the UIC Safety Office, and students are instructed and tested on knowledge of safety procedures. To ensure maximum direction of the student, an MAL faculty member and TA experienced in microfabrication are present at each laboratory session.
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