| Description:
Credit 4U/5G. Microfabrication techniques for microsensors, microstructures,
and microdevices. Selected examples of physical/chemical sensors and actuators.
Simulation experiments.
Prerequisite:
ECE 347
Textbooks:
L. J. Ristic "Sensor Technology and Devices" Academic Press, 1994.
References:
-
Middelhoek &
Audet, "Silicon Sensors," Academic Press, 1989.
-
Ruska, "Microelectronic
Processing," McGraw Hill, 1987.
Topics:
1.
Introduction
a. taxonomy of transducers, introduction to device fabrication
b. scaling effects,physical limits of microfabrication.
2. Micromachining
Processes
a. bulk micromachining
b. surface micromachining
c. reactive sputtering
d. the LIGA process
3. Physical
Transducers
Case studies:
a. silicon pressure sensor
b. silicon microaccelerometer
c. comb-drive electrostatic actuators.
4. Chemical
Transducers
Case studies:
a. Clark oxygen microelectrode
b. Ultrathin platinum film glucose sensor
c. Light addressable potentiometric sensors.
d. Transducer Interface Circuits
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