ECE 400 - Introduction to Microelectromechanical Systems

Description:  Credit 3U/4G. Definition, classification and case studies of transducers, sensors and actuators.  Microfabrication methods for microelectromechanical systems (MEMS).  Design, simulation and modeling of MEMS.

Prerequisite: ECE 346

Textbooks:  G.T.A. Kovac, "Micromachined Transducers Sourcebook, " McGraw Hill, 1998.

Topics:

· Definitions of transducers and sensors

· Classification of sensors

· Signal conversion

· Ideal characteristics of sensors

· Scalling laws

· Summary of microfabrication methods for MEMS

· Basic semiconductor device theory and P/N junction

· Sensing principles - electrical sensors

· Sensing principles - magnetic sensors

· Basic theoretical mechanics concepts

· Cantilever beams - static bending

· Sensing principles - mechanical sensors

· Device Case - study - pressure sensor

· Sensing principles - thermal sensors and heat transfer

· Device Case - study - flow sensor

· Actuation principles

· Sensor signals and interface electronics

· Design and simulation

· Design and modeling