Professor Vitali Metlushko, Director of the Nanotechnology Core Facility (The NCF UIC).

Prof. Metlushko's photo
  • The NCF
  • The NCF has some of the most sophisticated equipment currently available in the Chicago area including a 3000 ft2 Class 100/1000 Clean room, electron-beam lithography (Raith E-Line), optical lithography, stepper, mask fabrication, film deposition (sputtering and e-beam), etching (chemical, RIE and DRIE) and sample characterization (AFM, MFM etc.).
  • Contact Information:
    vmetlush@ece.uic.edu
    ph # (312) 413-7574
    fax# (312) 996-6465
    851 S. Morgan M/C 154 Chicago, IL. 60607
     
     

    Chicago SunTimes